Abstract: this article focuses on the design and simulation for optimal structure of cross type capacitive acceleration mems sensor. The sensor structure is built by using analytic model combining with the emulation using ansys workbench. This structure must meet all production criteria: acceleration range is 0 – 10 g, the size is not over 12´12 mm2, the resonant frequency is greater than 1 khz, the damping coefficient range is [0.59 – 0.707], and the minimum sensitivity is 0.5 pf.
Keywords: MEMS, resonant frequency, damping coefficient, mass, ANSYS.
Title: Design and simulation for optimal structure of cross type capacitive acceleration MEMS sensor
Author: Nguyen H. D. Khang, Duong T. Phuoc, Nguyen D. Giang, Truong H. Ly, Nguyen N. Viet
International Journal of Mathematics and Physical Sciences Research
ISSN 2348-5736 (Online)
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